JPH079333Y2 - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPH079333Y2
JPH079333Y2 JP13032090U JP13032090U JPH079333Y2 JP H079333 Y2 JPH079333 Y2 JP H079333Y2 JP 13032090 U JP13032090 U JP 13032090U JP 13032090 U JP13032090 U JP 13032090U JP H079333 Y2 JPH079333 Y2 JP H079333Y2
Authority
JP
Japan
Prior art keywords
ion source
ion
vacuum chamber
extraction electrode
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13032090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0487155U (en]
Inventor
浩司 堀川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP13032090U priority Critical patent/JPH079333Y2/ja
Publication of JPH0487155U publication Critical patent/JPH0487155U/ja
Application granted granted Critical
Publication of JPH079333Y2 publication Critical patent/JPH079333Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP13032090U 1990-11-30 1990-11-30 イオン発生装置 Expired - Lifetime JPH079333Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13032090U JPH079333Y2 (ja) 1990-11-30 1990-11-30 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13032090U JPH079333Y2 (ja) 1990-11-30 1990-11-30 イオン発生装置

Publications (2)

Publication Number Publication Date
JPH0487155U JPH0487155U (en]) 1992-07-29
JPH079333Y2 true JPH079333Y2 (ja) 1995-03-06

Family

ID=31877673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13032090U Expired - Lifetime JPH079333Y2 (ja) 1990-11-30 1990-11-30 イオン発生装置

Country Status (1)

Country Link
JP (1) JPH079333Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6166026B2 (ja) * 2012-09-19 2017-07-19 株式会社アルバック イオン照射装置
DE112018006577B4 (de) * 2018-02-28 2024-08-01 Hitachi High-Tech Corporation Ionenfräsvorrichtung und Ionenquellen-Justierverfahren für Ionenfräsvorrichtung

Also Published As

Publication number Publication date
JPH0487155U (en]) 1992-07-29

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